Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1414
23
Session ID : H-2
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H-2 Fabrication of GHz SAW Devices by EB-Based Lift-Off Process
Hiroshi Ozawa, Sho Nakagomi, Tatsuya Omori, Ken-ya Hashimoto, Masatsune Yamaguchi
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© 2002 Institute for Ultrasonic Elecronics
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