Contamination control and air cleanliness classification in clean rooms

Abstract

This paper focuses on the classification of air cleanliness and the associated testing methods based on the Japanese Industrial Standard JIS B 9920-1. It provides detailed information on precautions when using an LSAPC（ Light Scattering Airborne Particle Counter） for sampling, as well as selection criteria based on the performance and functionality. The aim is to provide practical knowledge that enables practitioners to carry out efficient, reliable, and standard-compliant cleanroom classification.