TEM/STEM observation and analysis of helium ion irradiated surfaces of α-alumina (α-Al₂O₃)

Abstract

Irradiation experiments to α-alumina (Al₂O₃) were carried out in an ion-implanter using a microwave ion source. The ultrathin section extracted from the irradiated surfaces of the corundum wafers were observed and analyzed with S/TEM. The diffraction pattern obtained from the irradiated area include the diffraction spots which could not be identified by the space group of α-alumina and the spots were explainable by the space group of the γ- or θ'-alumina.