Solution of inconsistency between SEM image and Crystal orientation data obtained by SEM-EBSD systems

Abstract

We confirmed the orientation shown by HKL channel 5  (Flamenco, Oxford Instruments) was just consistent with the SEM image rotated by 180 degree around the sample normal direction. We propose a solution for this problem amd confirm to obtain the consistent orientation relationship between SEM images and the crystal orientations obtained by the standard-EBSD and transmission-EBSD by changing the setting parameters ofsample tilt (degree) = -70 and detector orientation (degree) = 180, 90, 0.