Membrane-type Surface stress Sensor “MSS”

Abstract

Nanomechanical sensors have been expected as a promising platform for many fields owing to their high versatility; almost any kind of materials can be applied as receptor layers. Among various types of nanomechanical sensors, recently developed Membrane-type Surface stress Sensor (MSS) has attracted much attention as a new platform for mobile and/or Internet of Things (IoT)-based applications because it realizes both high sensitivity and a compact system at the same time. This article introduces the development process of MSS and its working principle with basic/technical details.