Experiments of Fine-Particle Plasma using Planar Magnetron Plasma System

Abstract

A planar magnetron plasma system was developed for the research of fine particle plasmas. Fine particles were successfully confined above the center of loop of magnetron plasma forming a three-dimensional structure against the gravity. Distribution of plasma density and potential measured by the method of Langmuir probe suggests that the horizontal confinement of fine particles is caused by electrostatic force, while the vertical lifting is not caused by the force but by another mechanism. A small cubic magnetron plasmas system, which has a potential to drive fine particles to the center of plasma, was developed for microgravity experiments.