Development of a Software to Analyze the Dispersion State of Particles on a Flat Substrate

Abstract

A program called “Roughness Analyzer,” has been developed with Visual Basic Language, and it can analyze the dispersion state of particles on a flat substrate from a three dimensional profile obtained by surface roughness meters. This software enables us to separate secondary particles agglomerated on the substrate to calculate the area, the volume and the average height of each secondary particle. Further, the surface of the substrate can be divided into any number from the center of the substrate in a radial direction and an angular direction, and then it is possible to calculate the area, the volume and the area occupied by the particles in each section. In addition, this software has functions such as the correction of only the shape of the substrate by a spline interpolation method and the conversion of any range on the substrate surface to DXF format.