Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2004 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 04-1P-02
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Preparation of super hard carbon thin film using a radio frequency plasma superposed by nano-pulse high voltage
*Kazuya Makio, [in Japanese], Tatsuya Misawa, Yasunori Ohtsu, Hiroharu Fujita
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© 2004 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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