Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2004 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 04-1P-07
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Control of Size in Ultra Fine Particles Sputtered in RF Inductively Coupled Plasma
*Takeshi Imamura, Tatsuya Misawa, Yasunori Ohtsu, Hiroharu Fujita
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© 2004 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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