Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2004 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 05-2A-08
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

High-quality formation of SiGe virtual substrate for strained-Si/SGOI structure
*Masanori Ikishima, Isao Tsunoda, Taizoh Sadoh, Masaharu Ninomiya, Masahiko Nakamae, Toyotsugu Enokida, Masanobu Miyao
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© 2004 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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