Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2005 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 04-1P-08
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Study on cBN film deposition by plasma jet CVD using a fluorine-containing gas
Ryota Yamao, Yousuke Hirayama, Kungen Teii
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© 2005 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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