Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2007 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 06-2P-10
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Preparation of high-deposition rate and uniform thin films of a-C:H with RF plasma CVD using ulti-hollow electrode
Chisa Nakamura, Yasunori Ohtsu, Tatsuya Misawa, Hiroharu Fujita
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© 2007 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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