Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2010 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 06-2P-04
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Measurement of Leak Rate for MEMS Vacuum Packaging using a Capacitive Tilt Sensor and a Quartz Turning Fork Resonator
Tao Chen, Masaaki Takamori, Toshitsugu Ueda
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Abstract
[in Japanese]
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© 2010 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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