Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2010 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 06-2P-11
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Study on high-quality InGaN films by sputtering method
Yuta Kusunoki, Hirotaka Senda, Katsuhiko Saito, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo
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[in Japanese]
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© 2010 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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