Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2011 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 13-1P-02
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Annealing method dependence of Au agglomerates generated in the annealing process of supersaturated Au in Si
Yuki Takahashi, Atsushi Hashimoto, Masami Morooka
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[in Japanese]
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© 2011 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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