Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2011 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 10-2P-12
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

The development of target uniformity sputtering system with unipole magnetic field profile
Masakazu Shigyo, Yasunori Ohtsu, Tatsuya Misawa
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[in Japanese]
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© 2011 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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