Record of 2012 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 02-2P-07
Conference information
Host: Joint Conference of Electrical and Electronics Engineers in Kyushu
Name : [in Japanese]
Number : 65
Location : [in Japanese]
Date : September 24, 2012 - September 25, 2012
Substrate Bias Effects on Irradiation of Hydrogen Plasma onto a Si Substrate
Details
