Record of 2012 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 02-2P-11
Conference information
Host: Joint Conference of Electrical and Electronics Engineers in Kyushu
Name : [in Japanese]
Number : 65
Location : [in Japanese]
Date : September 24, 2012 - September 25, 2012
Gas Temperature Measurement of the ICP Assisted DC Magnetron Discharge by TDLAS
Details
