Record of 2013 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 07-2P-01
Conference information
Host: Joint Conference of Electrical and Electronics Engineers in Kyushu
Name : [in Japanese]
Number : 66
Location : [in Japanese]
Date : September 24, 2013 - September 25, 2013
Post-discharge Study of Laser-triggered Vacuum Discharge for Highly Repetitive Powerful EUV Source
Details
