Record of 2014 Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 03-1A-04
Conference information
Host: Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Name : [in Japanese]
Number : 67
Location : [in Japanese]
Date : September 16, 2014 - September 17, 2014
Room-temperature deposition of Al-doped ZnO films with low resistivity using RF magnetron sputtering
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