Record of 2014 Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 04-1A-06
Conference information
Host: Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Name : [in Japanese]
Number : 67
Location : [in Japanese]
Date : September 16, 2014 - September 17, 2014
Evaluation of Capacitance Edge Effect on the Comb Electrodes of the Quartz MEMS Tilt Sensor
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