Record of 2019 Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 01-1P-07
Conference information
Host: Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Name : [in Japanese]
Number : 72
Location : [in Japanese]
Date : September 27, 2019 - September 28, 2019
Dependence of deposition features of a-C:H films deposited using Ar+CH4 plasma CVD on the gap between electrode and substrates
Details
