Record of 2020 Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 02-1P-03
Conference information
Host:
Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Name :
[in Japanese]
Number :
73
Location :
[in Japanese]
Date :
September 26, 2020 - September 27, 2020
Effects of distance between electrode and substrate on transport amount of carbon nanoparticles produced by multi-hollow discharge plasma CVD