Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 02-1P-09
Conference information
Host: Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Co-host: Nagasaki University
Name : The 75th Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Number : 75
Location : [in Japanese]
Date : September 16, 2022 - September 17, 2022
Proposal of a wafer transfer device using superconducting magnetic bearings using superconducting coils
Details
