Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 05-2P-01
Conference information
Host: Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Co-host: Nagasaki University
Name : The 75th Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Number : 75
Location : [in Japanese]
Date : September 16, 2022 - September 17, 2022
Dynamics of laser-ablated plasma plume for low-k film deposition
Details
