Record of 2024 Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 03-1A-04
Conference information
Host: Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Name : [in Japanese]
Number : 77
Location : [in Japanese]
Date : September 26, 2024 - September 27, 2024
Pole Pitch Dependence of Thrust Ripple Ratio of High Thrust Linear Synchronous Motor for Wafer Stage in Semiconductor Lithography System.
Details
