Record of 2024 Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Session ID : 04-2A-03
Conference information
Host:
Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
Name :
[in Japanese]
Number :
77
Location :
[in Japanese]
Date :
September 26, 2024 - September 27, 2024
Contribution of Deposition Conditions to Characteristics of a-C:H Deposition by Cumene Plasma CVD