JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
Online ISSN : 1881-1299
Print ISSN : 0021-9592
Short Communications
Properties of Silicon Produced by Monosilane Pyrolysis
Toshinori Kojima, Kimitoshi Usui, the late Takehiko Furusawa
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Keywords: Monosilane Pyrolysis, X-ray Diffraction, Hydrogen Release, Chemical Vapor Deposition, Polycrystalline Silicon, Fine Powder, Scanning Electron Microscopy
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1989 Volume 22 Issue 6 Pages 683-686

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© 1989 The Society of Chemical Engineers, Japan
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