JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
Online ISSN : 1881-1299
Print ISSN : 0021-9592
Transport Phenomena, Fluid Mechanics and Mixing
Deposition of Tungsten by Natural Convection Flow in CVD Process
Yasushi Sasaki, Seiju Sizuki, Kuniyoshi Ishii
Author information
Keywords: Chemical Vapor Deposition, Natural Convection, Tungsten, Mass Transfer, Thick Film
JOURNAL RESTRICTED ACCESS

1998 Volume 31 Issue 1 Pages 135-137

Details
Download PDF (495K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 1998 The Society of Chemical Engineers, Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top