Abstract
The carbon micro-coils were prepared by a ultrasonic wave CVD process, in which ultrasonic waves of 23–65 kHz were irradiated in the growing atmosphere of the carbon micro-coils. The irradiation effects of the ultrasonic waves on the growth, morphology and some properties of the carbon micro-coils were examined. With ultrasonic wave irradiation, the coil yield and the thickness of the coil layers increased by about 1.5 times and 1.3 times higher than that without irradiation, respectively. The coil diameter increased from 3–5 μm without irradiation to 5–9 μm with irradiation. The density increased from 1.8 g/cm3 without irradiation to 2.0 g/cm3 with irradiation by a 23 kHz ultrasonic wave.
