Journal of the Ceramic Society of Japan
Online ISSN : 1882-1022
Print ISSN : 0914-5400
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Control of Nano-Step Structures on Sapphire Wafer Surface by Focused Ion Beam Processing
Atsuko TAKEUCHIToshiro KOTAKIKoji KOYAMAKazuhiko SUNAKAWAYoichi YAGUCHIYoshinori MATSUIMasakazu MURASUGIShu SEKISeiichi TAGAWAWakana HARAMamoru YOSHIMOTO
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2005 Volume 113 Issue 1319 Pages 478-483

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Abstract

Nano-dots array whose diameter and interval were approximately 200 nm and 750 nm, respectively, were made parallel to the atomic step edges on sapphire wafers by focused ion beam (FIB) system. Upon annealing a bunched multi-steps structure formed at regularintervals and straight because the steps were pinned at the nano-dots. The step heights andterrace widths were approximately 2.0 nm, 700 nm in off-angle 0.15° and 10.0 nm, 350 nm in off-angle 1.0°, respectively.

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© 2005 The Ceramic Society of Japan
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