Highly Oriented Zinc Oxide Films by Chemical Vapor Deposition

Journal of the Ceramic Association, Japan

Online ISSN : 1884-2127
Print ISSN : 0009-0255
ISSN-L : 0009-0255

Highly Oriented Zinc Oxide Films by Chemical Vapor Deposition

Kiichiro KAMATA, Shigeki MATSUMOTO

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Keywords: Zinc oxide, Thin films, Chemical vapor deposition, β-diketon chelates, Acetylacetonate chelates

JOURNAL FREE ACCESS

1981 Volume 89 Issue 1030 Pages 337-338

DOI https://doi.org/10.2109/jcersj1950.89.1030_337

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