Preparation of a SrTiO3 Films by the Sol-Gel Method

Kumi OKUWADA; Shuichi KOMATSU

doi:10.2109/jcersj.100.1085

Journal of the Ceramic Society of Japan

Online ISSN : 1882-1022
Print ISSN : 0914-5400
ISSN-L : 0914-5400

Preparation of a SrTiO₃ Films by the Sol-Gel Method

Kumi OKUWADA, Shuichi KOMATSU

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Keywords: Film fabrication, Sol-gel method, SrTiO₃, Metal alkoxide, Dielectric constant, Perovskite

JOURNAL FREE ACCESS

1992 Volume 100 Issue 1164 Pages 1085-1087

DOI https://doi.org/10.2109/jcersj.100.1085

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Abstract

Strontium titanate (SrTiO₃) films with a thickness in the range of 100-200nm were prepared by the sol-gel method using metal alkoxides as starting materials. The perovskite phase was observed by X-ray diffraction analysis of the films heat-treated over 600°C. The dielectric constant was 30-60, which is lower than that of SrTiO₃ ceramics (250).

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