Abstract
Films in the system ZrO2-Y2O3 were prepared at 600°to 1000°C by chemical vapor deposition using β-diketone chelates of Zr and Y and O2. The films having Y2O3 contents from 2 to 12% were obtained at various evaporatiorn temperatures of the sources. The films containing less than 3mol% Y2O3 were composed of cubic and tetragonal phases. The films containing more than 3mol% Y2O3 had a cubic crystal structure. The lattice parameter of the cubic phase increased. from 5.11 to 5.16Å with increasing Y2O3 content. The deposition rates of the cubic-phase films at 620° and 660°C were 1.8 and 9.0μm/h, respectively. The film deposited at 660°C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660°C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.
