Abstract
A polycrystalline silicon carbide ceramic was treated with 5% fluorine in He at 250-600°C for 30min, and the surface change was studied by FT-IR, ESCA, XRD and SEM techniques. The contact angle of dropping distilled water increased from 74° to 115° by the treatment at 400°C due to the formation of C-F bond on the SiC surface. The contact angle decreased, however, by the treatment above 400°C because the surface became rough due to severe corrosion by fluorine.
