Formation and Electrical Properties of Ferroelectric Pb(Zr, Ti)O₃ Thin Films by Spin-Coating and Pyrolysis of Metal Naphthenates

Abstract

The formation of ferroelectric Pb(Zr, Ti)O₃ thin films was carried out by spin-coating and pyrolysis of the metal naphthenates. The solution for spin-coating was prepared by mixing Pb, Zr and Ti naphthenates at the Pb:Zr:Ti molar ratio of 1.05:0.52:0.48. Homogenous precursor films spin-coated on Pt plates were heat-treated in air at 500°C for 5 min for crystallization into the single-phase ferroelectric perovskite Pb(Zr, Ti)O₃. The resultant film shows good ferroelectric properties: the coercive field E_c and the remanent polarization P_r were estimated to be 39kV/cm and 24μC/cm², respectively.