Preparation and Piezoelectricity of c-Axis Oriented LiNbO₃ Thin Films on Polycrystalline Si₃N₄ Substrates

Abstract

C-axis orientation of LiNbO₃ thin films prepared on polycrystalline Si₃N₄ substrates by RF magnetron sputtering was optimized by analysis of the variance. The LiNbO₃ thin film was completely oriented in the c-axis direction. Using an interdigital transducer fabricated on the film, a resonance was observed at a frequency of 800MHz, which showed that the film exhibited piezoelectric properties. It was proved that a c-axis-oriented LiNbO₃ thin film can be used to detect mechanical impact.