Preparation of Photoreactive Zirconium Precursor Stabilized by Aromatic Diethanolamines and Its Application for Fine Patterning

Abstract

The chemical stability and photoreactivity of zirconium precursor was successfully improved by the additions of N-phenyldiethanolamine and diethanolamine. The prepared solution has strong absorptions at 256 and 302nm, leading to the effective absorption of ultra-violet light. Photolithographic patterning of zirconium precursor film could be obtained by the UV irradiation. It is reported that the metal alkoxide solutions chemically modified with alkanolamines, such as diethanolamine and triethanolamine, can be used for the patterning of the metal oxide films. However, the procedure possesses a weak points in how to make a precursor with little absorptions in the regions of the emission of a convenient mercury lamp. The present modification has solved this problem by the chemical modification of zirconium iso-propoxide upon additions of N-phenyldiethanolamine and diethanolamine.