Moisture-Resistance and Displacement of Piezoelectric Multilayer Actuator with Interdigital-Electrode-Type Structure

Abstract

The structure of piezoelectric multilayer actuator with interdigital-electrode-type structure was investigated in order to improve both its moisture-resistance and displacement. The moisture-resistance was affected by the number of ceramic layers and by the shape of its internal electrode as well. An actuator with 20 layers in which the length of the inactive electrostrictively part was 0.6mm showed high moisture-resistance, and generated 1.7μm in displacement at DC 150V. In addition, it was also observed that inhomogeneous sintering reaction in the actuator affects its moisture-resistance.