2001 Volume 109 Issue 1270 Pages 574-575
The effect of RuO2 thin films on stabilizing the thermal properties of Au thin films deposited on Al2O3 substrates was investigated. Dependencies on temperature of both sheet resistance and adhesion strength were measured. The adhesion strength of the Au/RuO2 system was constant with temperature, while that of the Au/Pt/Ti system decreased as increasing temperature beyond 400°C. The adhesive properties of the Au/RuO2 system were not influenced by heating and stable up to 800°C. The sheet resistance of the Au/RuO2 system remained constant up to 700°C. The RuO2 thin films can operate as heat-resisting adhesion layers in Au thin films. Au thin films were highly oriented in the Au(111) plane.
