Mirror Finished Surface Grinding of Hot-Pressed Silicon Nitride

Abstract

Mirror finishing of hot-pressed silicon nitride ceramics was studied by grinding using conventional abrasive wheels. In order to obtain mirror finished surface, it is necessary to grind at lower grinding pressure using a proper abrasive wheel of I-K grade. In this case, rubbing without cutting results in a large amount of residual stock and mirror finished supface free from thermal cracks. Then, in this method, the finishing surface of 0.04-0.02μm R_max was obtained for some kinds of fine ceramics.