Journal of the Ceramic Society of Japan
Online ISSN : 1348-6535
Print ISSN : 1882-0743
ISSN-L : 1348-6535
Special Article: The 62th CerSJ Awards for Academic Achievement in Ceramic Science and Technology: Review
Fabrication of high-density electron-doped 12CaO·7Al2O3 thin films by physical and chemical processes
Masashi MIYAKAWA
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2009 Volume 117 Issue 1363 Pages 395-401

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Abstract

12CaO·7Al2O3 (C12A7) crystal is a constituent of alumina cements and an electrical insulator having a wide bandgap of ∼7 eV. When high-density electrons were doped into C12A7 by replacing the O2- ions in its crystallographic cages with electrons almost exclusively (C12A7:e-), they exhibited metallic conduction with a small work function of ∼2.4 eV, making the C12A7:e- attractive for use in electronic devices. This article focuses on comparing two fabrication methods for the C12A7:e- thin films: ion implantation of inert gas ions and a reduction reaction using an oxygen deficient amorphous C12A7 layer. Further, their respective electrical and optical properties are discussed.

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© 2009 The Ceramic Society of Japan
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