Abstract
MgO films were synthesized on stainless steel electrodes by a chemical-vapor-deposition method operated under atmosphere to reduce a discharge inception voltage in diode type discharge system under 6%Xe + 94%Ne atmosphere. The relationship between crystalline perfection of the MgO film and discharge inception voltage was investigated. In this study, crystalline perfection is quantified by the true density of the film. The discharge inception voltage was varied with the true density of the MgO film. The MgO film with 87% of the theoretical density indicated a minimum discharge inception voltage under various gas pressures and electrode distances.
