Abstract
Barium titanate (BaTiO3, BT) ceramics with various grain sizes were prepared by hot isostatic pressing (HIP) and post-annealing. The dielectric and piezoelectric properties were evaluated. Grain growth was suppressed in the ceramics prepared by HIP. The average grain sizes of the ceramics were controlled by changing the post-annealing temperature. Dense BT ceramics with submicron grain sizes were obtained by annealing below 1000°C. The highest piezoelectric d33 coefficient, 172 pC/N, measured by a d33 meter was obtained in the BT ceramics prepared by HIP at 900°C under the pressure of 200 MPa and annealed at 1100°C in air for 48 h. The dynamic electric field-induced strain increased with the annealing temperature, and 700 pm/V of Strain/Field was obtained in the BT ceramics prepared by HIP under the same conditions and annealed at 1300°C in air for 48 h.
