Applications of functional ceramic coating fabricated by photo-assisted metal–organic deposition

Abstract

New technological demand has been opened rapidly to develop a fabrication of coating thin film on various substrates via relatively sustainable methods with consuming least resources and conserving energy. To satisfy the new demand, we propose an original process to fabricate functional ceramic films at ambient temperature by an ultraviolet light reaction after coating of metal–organic compound and nanoparticles on substrates. Based on our research, oxide thin films containing of epitaxially grown grains as well as polycrystals can be individually fabricated by changing the process parameter. In this review, I introduce about highly functional thin films developed with my collaborators. The novel thin films include a flexible transparent conductive film, a high-brightness phosphor film, and bolometer film with a high temperature coefficient of resistivity. I introduce an effectiveness of our laser irradiation process to control a texture such as polycrystals and epitaxially grown grains in novel and/or flexible ceramic thin films. In addition, I explain the mechanism and influencing factors of the generation of these thin films and discuss the applications of the films to electronic and optical components and devices.