Measurement of mechanical properties of BaTiO₃ layer in multi-layered ceramic capacitor using a microcantilever beam specimen

Abstract

The measurement of the mechanical properties of electroceramics is important for improving the reliability of ceramic components and devices. Although information of the mechanical properties at the microscale level, especially under tensile or bending stress, is desired, this has not yet been reported. In this study, a bending test using a microcantilever beam specimen was applied to measure the mechanical properties of the BaTiO₃ layer in a multi-layered ceramic capacitor. As a result, a nonlinearity relationship between stress and strain was observed during the bending test. The bending strength and failure strain, measured using the microcantilever beam specimen, were much higher than those measured using bulk specimens and almost the same or higher than those of conventional Si₃N₄ ceramics, as the fracture origin was nano-size.