Journal of the Ceramic Society of Japan
Online ISSN : 1348-6535
Print ISSN : 1882-0743
ISSN-L : 1348-6535
Technical reports
Characteristics of oxygen diffusion induced by Al and Li interaction in Al-implanted zinc oxide ceramics
Isao SAKAGUCHI
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2020 Volume 128 Issue 2 Pages 92-95

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Abstract

We studied on the oxygen diffusion in two kinds of Al implanted ZnO samples (100 keV, 4 × 1014 ions/cm2). Parts of samples were annealed to diffuse simultaneously Al and Li impurity, and then same concentration distribution of Al and Li were observed. Through the oxygen diffusion experiments, the feature of bulk diffusion in the pre-annealed samples was separated at 950°C so that the large activation energy for bulk diffusion was observed below the pre-annealing temperature. Oxygen diffusion feature was explained as result from interaction between Al and Li for the pre-annealing.

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© 2020 The Ceramic Society of Japan
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