Chemical vapor deposition of highly oriented ceramic coatings in a high-intensity laser irradiation

Abstract

High-intensity laser irradiation promotes a chemical reaction between the vapor phase and the film surface in the chemical vapor deposition (CVD) process, resulting in a high-speed deposition and a significant oriented growth of various kinds of oxides, nitrides, carbides, and their compounds and composites. TEM observation revealed unique microstructures, such as columnar, feather-like, and single-crystalline growth, in the produced CVD coatings. This CVD process enables the combination of high-speed epitaxial growth and excellent properties for structural and functional ceramic coatings. Traditional ceramics, such as Al₂O₃, TiO₂, Al₂TiO₅, BaAl₁₂O₁₉, BaTiO₃, YBa₂Cu₃O_7−δ, and CeO₂, can be still highly valued as practical materials by functionalization of ceramic coatings with the control of orientation and nanostructure.