2021 Volume 129 Issue 4 Pages 217-222
In this paper, the results of evaluating vibration power generation by increasing the area of the BaTiO3 (BT) film formed on a stainless-steel substrate by aerosol deposition (AD) is presented. Fe–Cr–Al-based heat-resistant stainless steel with a thickness of 0.1 mm was used as the substrate. BT films with a thickness of about 10 µm were formed on the substrate of six different shapes with different widths and lengths and BT films were annealed at 1000 °C. Electrodes were formed on the surface of these samples, and the poling process with a voltage of 60 V was applied to prepare samples for evaluation. A weight was attached to the tip of these samples and set up in a cantilever state. A damped vibration under the same stress condition was applied to the BT film by pushing and snapping the tip of samples one time. The generated voltage on the load resistance connected in parallel to the BT film was measured and the generation energy was evaluated. As a result, it was confirmed that the generation energies of the samples with areas of 15 × 3 and 30 × 40 mm2 were 0.17 and 39 µJ, respectively. About 230 times as much energy was obtained by increasing the film area about 20 times. This result indicates that increasing the film area using AD method effectively increases the generation energy.