Selectively enhanced microarea crystal growth of ZnO nano- and microwires on GaN on sapphire substrates by mist chemical vapor deposition

Abstract

The selectively enhanced micro area crystal growth of ZnO nano- and microwires on GaN on sapphire substrates by mist chemical vapor deposition (mist-CVD) was demonstrated. Micropatterns of a thin Au layer were formed on the surface of a GaN crystal by a simple technique. ZnO nano- and microwires with high crystal growth rates were grown on the micropatterned thin Au layer, resulting in selectively enhanced microarea crystal growth. The lengths of some ZnO nano- and microwires were more than 15 µm for 30 min crystal growth.